ProductsProducts
Spectroscopic Film Thickness Measurement System
VM-2500/
VM-3500
Wafer size 100mm ~ 300mm
High-speed mode achieves a high throughput of 160 WPH, optimal for multipoint measurement of communications devices and other products.
- The VM-2500/VM-3500 series offers a high throughput of up to 160 wafers per hour in high-speed mode (during five-point measurement of SiO2 wafers).
- The VM-2500/VM-3500 series features a log function that supports improved maintenance. SCREEN has also taken advantage of its years of experience in the semiconductor industry to create a design that makes maintenance easy.
- Recipes are easy to create, and entering optical constants is simple, thanks to SCREEN's experience in the field. The software can be controlled almost entirely using the mouse, and pen touch panel operation is also supported.
- The Windows 10 operating system is installed as standard.
- The VM-2500/VM-3500 series features a space-saving, compact design that makes it easy to fit the units into existing spaces and makes production line layout much easier.
- The VM-3500 can be optionally equipped with a trench measurement mechanism, enabling it to measure both film thickness and trench depth.
Other
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Ellipsometric Film Thickness Measurement System
RE-3500
Wafer size 125mm ~ 300mm
Measurement Equipment to Support Electronic Devices for loT.
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Spectroscopic Film Thickness Measurement System
VM-1200/
VM-1300Wafer size 100mm ~ 300mm
A desktop model that can be incorporated into production lines
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Spectroscopic Film Thickness Measurement System
VM-1020
Wafer size 50mm ~ 300mm
Microscope model that is ideal for R&D