特長

1. 1. High productivity

   The SS-80EX features the same advanced spin scrubber technology developed by SCREEN over many years while also delivering significantly improved functionality. High-speed processing of up to 160 wafers per hour is now possible, representing a 111%* increase over current SCREEN models.
   * May vary according to system configuration and processing conditions.

2. 2. Greater operability

   制御システムをリニューアルし、直感的な簡単操作でオペレーションできる専用GUIを搭載。現場の作業効率向上に貢献します。

3. 3. Improved stability

   The SS-80EX features a proprietary detachable chamber design that dramatically cuts downtime. With this setup, maintenance procedures such as brush and pin replacement or cup cleaning can be performed on stopped chambers while the others continue to operate.

4. 4. Diverse cleaning tools

   Six types of highly reliable and proven cleaning tools are available, providing support for a wide range of different goals and applications. An enhanced bevel cleaning function provides high-precision movement and control of brushes. This technology has proven to be highly effective for improving yield rates.

5. 5. Flexible configuration

   The basic two head specification can be expanded to accommodate up to six heads according to space and performance requirements. This allows flexible expansion of a system even after installation.