ProductsProduct Lists
Wafer Cleaning System
Wet Station
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Wet Station
CW-2000
Wafer size 50mm ~ 200mm
Half the Footprint, 1.5 Times the Productivity! Excellent Cost-Performance!
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Wet Station
WS-620C/
WS-820C/
WS-820LWafer size 150mm ~ 200mm
High Throughput Batch Cleaning Systems Enable Flexible Line Configurations
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Wet Station
FC-821L
Wafer size 200mm
Compact Half-pitch and One-bath Batch Cleaning System
Measurement System
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Spectroscopic Film Thickness Measurement System
VM-2500/
VM-3500Wafer size 100mm ~ 300mm
High-speed mode achieves a high throughput of 160 WPH, optimal for multipoint measurement of communications devices and other products.
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Spectroscopic Film Thickness Measurement System
VM-1200/
VM-1300Wafer size 100mm ~ 300mm
A desktop model that can be incorporated into production lines
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Spectroscopic Film Thickness Measurement System
VM-1020
Wafer size 50mm ~ 300mm
Microscope model that is ideal for R&D
